MEMS慣性傳感器優(yōu)勢解析
—— THELMA制程和低成本封裝方法
加入技術(shù)交流群
本文引用地址：http://www.bjwjmy.cn/article/114996.htm
參考文獻
[1] B. Vigna, “MEMS Epiphany,” MEMS 2009 Conference, Sorrento Italy, January
26, 2009.
[2] Source, iSuppli Corporation, See: http://www.isuppli.com
[3] B. De Masi and S. Zerbini, “Process builds more sensitive structures,” EE Times,
November 22, 2004.
評論